TECH&PRODUCTS
We satisfy our customers with the best quality and trust through the most talented staff members,
the best technologies, and constant challenges.
Fume Free System
Leading the World in Semiconductor Industry through an Engineering Approach
FFS 2000 Major Functions
- Removes Wafer residue gases(fume)
- Controls temperature and humidity
- Blocks the ambient air (alleviates sensitivity effect)
- Easy set-up and maintenance
- Monitors real-time machine environment
FFS Hybrid Major Functions
- Equipped with the next-gen Fume Free System that controls the reactivity or the contaminants while transferring wafers in order to increase ‘yield’ and that can control the environment more effectively for micro-processes
- A system applied with the mode which can cope with the wafers, targeted for 10nm-or-below process, in a variety of ways (various airflow control modes)
- Fluid speed control and ambient air prevention through whirling airflow and deflected airflow
