In Situ Post Purge System (Fume Removal System) removes fumes or residual gases on the surface of processed wafer rapidly and efficiently right after coming into this unit.
In fact , The fumes will make corrosion any parts inside EFEM including robot as well as will be the source of particle or killer defects of the another wafers.
Thus, Fume Remover offers you and your products to best performance and productivity.


- Particle improvement
- MWBC improvement
- Efficient fume exhaust